Picture of Activator
Current status:
AVAILABLE
Book | Log
Show/Collapse all

1st Responsible:
2nd Responsible:
You must be logged in to view files.

Technical description
1. Full equipment name: Centrotherm Activator 150
2. General purpose: Anneal furnace
3. Detailed description
High temperature furnace for Sic Anneal
4. Capabilities
Max size Sic wafer : 4”
Max wafer carrying capacity : 5
Max Anneal temperature: 1700 deg C
5. Restrictions
Make sure to check if your sample is suitable to be annealed in the Activator.

Tool name:
Activator
Area/room:
C-Anneal
Category:
Thermal processes
Manufacturer:
Centrotherm
Model:
Activator 150 (SiC anneal)
Tool rate:
D

Instructors

Licensed Users

You must be logged in to view tool modes.