Technical description
Full equipment name: Mattson 100 RTP Systems
General purpose: Rapid thermal processing
Technical data:
• Steady-state temperature range 450 – 1100 °C
• Steady-state temperature stability 1°C
• Temperature monitoring by optical pyrometer
• Heating rate 5 – 50 °C per second
• Cooling rate max. 50 °C per second
• Available gases: Ar, O2, N20 and N2