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MyFab - The Swedish Micro and Nano Fabrication Network
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R/D Gold (5057)
Current status:
DOWN
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Responsibles
1st Responsible:
Arman Sikiric
2nd Responsible:
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Description
Details
Tool name:
R/D Gold
Area/room:
C-Wet Chemistry
Category:
Wet process benches
Manufacturer:
FSI Phoenix
Model:
FSI Phoenix 4" Au/Lift-Off
Tool rate:
A
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