Technical description
Full equipment name: Veeco Wyko NT9300
General purpose: white light interferometer for non-contact topography & roughness measurement
Technical data:
Magnifications:
Objectives: 2.5x, 5x, 20x, 50x
FOV lenses:0.55x, 1x, 2x
Resolution in z-direction:
3 Å in PSI mode
3 nm in VSI mode
Available add-ons:
- advanced analysis - stitching - automation
General description: Other Characterization