Picture of Prometeus auto
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Sergey Reshanov
2nd Responsible:
Adolf Schöner
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Description

General description: Electric/Magnetic Characterization

Technical description
Full equipment name: Karl Suss Mod PA 150 and Temptronic ThermoChuck System mod TP03215B-3300-2
General purpose: Automatic Probe station and measurement at different temperatures.
Wafer size: Diam. 6" / 150 mm
Temperature range: 0 - 200 °C

Details
Tool name:
Prometeus auto
Area/room:
N-Measurement
Category:
Metrology
Manufacturer:
Karl Suss and Temptronic TermoChuck System
Model:
Automatic Probestation PA 150 and TP03215B-3300-2
Tool rate:
C
Instructors & Licensed Users

Instructors

Licensed Users

Tool Modes
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