Picture of R/D double
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Arman Sikiric
2nd Responsible:
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Description

Stacker SRD with one rotor for 4" and one for 6" wafers.

Details
Tool name:
R/D double
Area/room:
C-Wet Chemistry
Category:
Wet process benches
Manufacturer:
Semitool
Model:
Semitool Double 870S
Tool rate:
A
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Instructors

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Tool Modes
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