Technical description
Full equipment name: Wet Bench Solvent Clean W42
General purpose: Cleaning wafers/samples from organic residue
Technical data:
• Wet bench for 4 inch substrates
• Chemicals: Propanol, Acetone
• 2 ultrasonic solvent baths (stainless steel) with drain valves
• Cassettes, cassette holders and single wafer holders with yellow markings