Picture of Zita
Current status:
AVAILABLE
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Technical description
Full equipment name: Balzers BAE 250 Coating System
General purpose: Metalization by thermal evaporation
Technical data:
• Standard process for Au/Zn/Au ohmic contact.
• Single and multi-substrates holder for 2” wafers.
 

Tool name:
Zita
Area/room:
Y-yttrelab
Category:
Thin film deposition
Manufacturer:
Balzers
Model:
BAE 250 Coating System
Tool rate:
D
Max booking time, day:
hours
Max booking time, night:
hours
No. of future bookings:

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