Picture of Tencor P15
Current status:
AVAILABLE
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Technical description
Full equipment name: Surface profiler Tencor-P15
General purpose:
1. Measure the profile of a structure
Technical data:
• For profile measurement: All wafer size up to 6” and piece of wafer
• Single wafer
Equipment inventory:
• Two boxes with calibration structures
• Manual for Tencor-P15

General description: Other Characterization

Tool name:
Tencor P15
Area/room:
C-Anneal
Category:
Metrology
Manufacturer:
Tencor
Model:
Surface profiler Tencor-P15
Tool rate:
B
Max booking time, day:
hours
Max booking time, night:
hours
No. of future bookings:

Instructors

Licensed Users

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