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Specifications of Freja,

A field emisision scanning electron microscope Hitachi regulus Model SU8230

1. Electron optics

Electron gun: Cold Cathode field emission type

Extracting voltage: 0 to 6.5 kV

Accelarating voltage : 0.5 to 30 kV under normal optics and 0.01 to 2 kV under deaccelarating optics

2. Resolution

 0.6 nm (at accelating voltage 15 kV, working distance of 4 mm, magnification of 270,000) and 0.7 nm (at landing voltage 1kV, working distance of 1.5 mm, magnification of 200,000 in deaccelaring mode). These numbers are based on Hitachi resolution measurement specimen. 

3. Magnification

100x to 1,000,000x in high magnification mode

20x to 2000x in low magnification mode

4. Detectors

Top, upper and Lower triple detector, SE/BSE selectable

Bruker XFlash Energy-dispersive x-ray detector

Bruker FlatQuad Energy-dispersive x-ray detector

Transmitted Electron detector

 

 

 

Tool name:
Freja
Area/room:
Pronano A:109
Category:
Surface analysis & TEM
Manufacturer:
Hitachi
Model:
SU8230
Tool rate:
D
Max booking time, day:
hours
Max booking time, night:
hours
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