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Opt. Profiler Albanova (131)

Current status:

DOWN

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Responsibles

1st Responsible:

Anders Liljeborg

2nd Responsible:

Files

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Description

White light interferometer with 10x objective for 3D profiling of e.g. step height, roughness, film thickness etc.

Details

Tool name:

Opt. Profiler Albanova

Area/room:

Albanova E1:1015A

Category:

Metrology

Manufacturer:

gbs

Model:

SmartVIS 3D

Tool rate:

Tool Modes

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