Technical description
Full equipment name: Surface profiler Tencor-P10
General purpose:
1. Measure the profile of a structure
Technical data:
• For profile measurement: All wafer size up to 6” and piece of wafer
• For stress measurement: 4” and 3”
• Single wafer
Equipment inventory: 
• Two boxes with calibration structures
• Manual for Tencor-P15

General description: Other Characterization