Picture of Karl Suss MJB3 Albanova
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DOWN
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Responsibles
1st Responsible:
Adrian Iovan
2nd Responsible:
Erik Holmgren
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Description

Karl Süss MJB3 contact maskaligner.

Three inch wafers maximum.

Info and Manuals.

Details
Tool name:
Karl Suss MJB3 Albanova
Area/room:
Albanova C1:3049
Category:
Lithography
Manufacturer:
Karl Suss
Model:
MJB3
Tool rate:
C
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Tool Modes
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