Picture of Karl Suss MJB3 Albanova
Current status:
AVAILABLE
Book | Log
Show/Collapse all

1st Responsible:
2nd Responsible:
You must be logged in to view files.

Karl Süss MJB3 contact maskaligner.

Three inch wafers maximum.

More info here.

Tool name:
Karl Suss MJB3 Albanova
Area/room:
Albanova C1:3049
Category:
Lithography
Manufacturer:
Karl Suss
Model:
MJB3
Tool rate:
C
Max booking time, day:
4 hours
Max booking time, night:
8 hours
No. of future bookings:
3

Instructors

Licensed Users

You must be logged in to view tool modes.