Picture of Critical Point Dryer
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Technical description
Full equipment name:
Baltec Critical Point Dryer
General purpose: Automatic process cycle for drying of 4, 6, 8 inch wafers and small wafer pieces using super critical CO2.
Technical data:
Sample medium used is Isopropanol.

Organic matter/Polymer is forbidden in CPD.

Tool name:
Critical Point Dryer
Area/room:
C-APL-SiC
Category:
Other processes
Manufacturer:
Baltec
Model:
CPD 408
Tool rate:
C
Max booking time, day:
4 hours
Max booking time, night:
hours
No. of future bookings:

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