Picture of RTA
Current status:
AVAILABLE
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Technical description
Full equipment name: Mattson 100 RTP Systems
General purpose: Rapid thermal processing
Technical data:
• Steady-state temperature range 450 – 1100 °C
• Steady-state temperature stability 1°C
• Temperature monitoring by optical pyrometer
• Heating rate 5 – 50 °C per second
• Cooling rate max. 50 °C per second
• Available gases: Ar, O2, N20 and N2

Tool name:
RTA
Area/room:
C-Anneal
Category:
Thermal processes
Manufacturer:
Mattson
Model:
100 RTP Systems
Tool rate:
D
Max booking time, day:
hours
Max booking time, night:
hours
No. of future bookings:

Oxidation of Si, 1100C, 58 sec gives tox=17 +/- 2 nm 

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