Picture of Manual spray coater
Current status:
AVAILABLE
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Technical description
Full equipment name:

General purpose: Home made setup mounted on an SSE Primus SB15 spinner
Technical data:
The tool is configured for 100 mm wafers. Resist thickness uniformity over wafer +-20%.

Tool name:
Manual spray coater
Area/room:
C-Gul 1
Category:
Lithography
Manufacturer:
Home made
Model:
v1
Tool rate:
A
Max booking time, day:
hours
Max booking time, night:
hours
No. of future bookings:

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