Picture of Edvard
Current status:
AVAILABLE
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Technical description
Full equipment name: Edwards 306 Thermal Evaporator
General purpose: Thermal high precision angle evaporation of metals
Technical data:
• Two-position resistive evaporation source
• Fully automatic turbomolecular pumping system
• Base pressure of < 5E-6 mbar
• Wafer size compatibility up to 8”
 

Tool name:
Edvard
Area/room:
C-Metal-III/V
Category:
Thin film deposition
Manufacturer:
Edvards
Model:
160
Tool rate:
D
Max booking time, day:
hours
Max booking time, night:
hours
No. of future bookings:

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