Picture of Dektak
Current status:
WARNING
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Technical description
Full equipment name: Dektak3ST
General purpose: Measure the profile of a structure
Technical data:
• For profile measurement: All wafer size up to 4” and piece of wafer
• Single wafer

General description: Other Characterization
 

Tool name:
Dektak
Area/room:
C-APL
Category:
Metrology
Manufacturer:
ST
Model:
Dektak3ST
Tool rate:
B
Max booking time, day:
hours
Max booking time, night:
hours
No. of future bookings:

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