Picture of Arnold
Current status:
AVAILABLE
Book | Log
Show/Collapse all

1st Responsible:
2nd Responsible:
You must be logged in to view files.

Technical description

Full equipment name: OPTIspin SST20
General purpose: Coating samples with standard photoresist films. NOT PDMS or other non-soluble photoresist. 
Technical data:
• Wafer size up to 8”
• Spin speed range: 100 – 6000 rpm
• Spin time range: 0 - 999 seconds
• Interlock switch to protect spinning without vacuum
• Programmable remote control unit
 

 

 

Tool name:
Arnold
Area/room:
C-APL-gul
Category:
Lithography
Manufacturer:
SSE spincoater
Model:
OPTISPIN SST20
Tool rate:
B

Instructors

Licensed Users

You must be logged in to view tool modes.