Picture of Eurovac UHV deposit Albanova
Current status:
DOWN
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Responsibles
1st Responsible:
Taras P Golod
2nd Responsible:
Erik Holmgren
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Description

Depositioning system, e-gun, UHV.

Five avaliable crucibles, max. sample size about 30 mm.

Info and Manuals.

Details
Tool name:
Eurovac UHV deposit Albanova
Area/room:
Albanova E1:1017A
Category:
Thin film deposition
Manufacturer:
Eurovac/Thermionics
Model:
Custom made
Tool rate:
D
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